21B2　U90 - Gas Phase

Optical Parameters

Monochromator	6m-CGM
Mirrors	HFM(spherical), VFM (spherical), PM (plane), VRFM (bendable cylindrical), HRFM (cylindrical)
Method of Focusing	VRFM, HRFM
Beam Size on Sample or Detector (FWHM)	200 μm × 40 μm

	Horizontal Mirror HFM	Vertical Pre-focusing Mirror VFM	Vertical Plane Mirror PM₂(Low Energy)	Vertical Plane Mirror PM₃(High Energy)	Vertical Refocusing Mirror VRFM	Horizontal Refocusing Mirror HRFM
r1, r2 (cm)	r1 = 1200 r2 = 814	r1 = 1415 r2 = 195/303	r1 = 245.7 r2 = 54.4	r1 = 144.7 r2 = 48.4	r1 = 200 ~ 300 r2: variable	r1 = 637 r2 = 200/350
Deviation Angle (2θ)	172°	165˚/158˚	118.08˚	145˚	170˚	165˚
Type	Spherical	Spherical	Plane	Plane	Tan. Cylinder (bendable)	Tan. Cylinder
Cooling System	Side	Side	Back	Back
Beam Foot Print (cm × cm)	15 × 0.8	4.5 × 1.2	1.4 × 0.3	1 × 0.5	16 × 2.5	16 × 1.4
Absorbed Power (W)	850	90	17	20	/	/
Power Density (W/cm²)	70	17	40	40	/	/
Size (L × W × H) cm³	20 × 2.5 × 2.5	10 × 2.5 × 2.5	5 × 2.5 × 0.8	5 × 2.5 × 0.8	40 × 5 × 10	30 × 5 × 7.6
Coating	Au	Au	Au	CVD SiC	Au	Au
Substrate	Si	Si	CVD SiC	CVD SiC	Glidcop	Glidcop
Curvature (cm)	13902	2620	∞	∞	R = 2500 ~ 4000	R = 2332 R = 3461
Slope Error (arcsec)	0.2	0.2	0.2	0.2	0.5	1